| Axcelis Technologies, Inc. engages in the design, manufacture and service of dry strip, ion implantation and other processing equipment used in the fabrication of semiconductor chips. The company provides service and support, including spare parts, equipment upgrades, maintenance services and customer training. Its products include Purion H, which is next generation single wafer high current implanter; Optima HDx, is designed to maximize beam current, minimize beam setup time and deliver productive process across the applications space; Purion XE, is next generation single wafer high energy implanter, it is the second tool in the expanding family of Purion ion implanters; Optima XEx, includes implant energies matched to meet the changing needs of today's advanced device manufacturing; Paradigm XE, offers implant energies matched to meet the changing needs of advanced logic and memory manufacturing; and Purion M, is a low energy, medium current ion implanter for all channel engineering applications in the low dose and mid dose regimes. |
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