| MKS Instruments, Inc. engages in the provision of instruments, subsystems, and process control solutions to measure, control, power, monitor, and analyze parameters of manufacturing processes. It operates through the Vacuum and Analysis; and Light and Motion segments. The Vacuum and Analysis segment comprises pressure measurement and control, flow measurement and control, gas and vapor delivery, gas composition analysis, residual gas analysis, leak detection, control technology, ozone generation and delivery, RF & DC power, reactive gas generation, and vacuum technology components. |
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